MULTISTAGE FLOW-RATE WASHING METHOD AND MULTISTAGE FLOW-RATE WASHING DEVICE

摘要

A multistage flow-rate washing method and a multistage flow washing device capable of effectively washing an object to be washed with the flow of washing fluid and suppressing foreign matter adhering to the surfaces of the object to be washed from increasing, wherein a washing tank (10) to store the object to be washed is disposed, a feed line (14) to feed washing fluid such as pure water through the bottom of the washing tank is provided, and a valve (12) to regulate the flow-rate of the washing fluid is disposed in the feed line (14). Provided in the valve (12) are a stop part (12a) which controls the outflow of the washing fluid by opening or closing the feed line (14) and a bypass (12b) which feeds the washing fluid through the stop part (12a). Also the valve (12) is disposed so that the feed flow-rate of the washing fluid supplied to the washing tank (10) can be regulated in two stages by a feed flow-rate from the bypass (12b) and a feed flow-rate from the stop part (12a).