发明名称 ADJUSTMENT METHOD OF ILLUMINANT DEVICE AND ILLUMINANT DEVICE, EXPOSURE METHOD AND ALIGNER AND DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an adjustment method of an illuminant device which can adjust characteristics of an optical axis of light emitted from an illuminant device surely with less labor, and an illuminant device. SOLUTION: An illuminant device 10 comprises a housing 50 wherein an opening 51 for emitting light is formed and a plurality of units 11, 20, 30 stored inside the housing 50. At least one unit of a plurality of units 11, 20, 30 is moved inside the housing 50 and optical axis of the light is adjusted.
申请公布号 JP2002329654(A) 申请公布日期 2002.11.15
申请号 JP20010133345 申请日期 2001.04.27
申请人 NIKON CORP 发明人 HAGIWARA SHIGERU
分类号 G02B7/00;G02F1/13;G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 G02B7/00
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