发明名称 METHOD OF FORMING THIN FILM PATTERN, METHOD OF MANUFACTURING ORGANIC ELECTRO LUMINESCENT ELEMENT, METHOD OF MANUFACTURING COLOR FILTER, METHOD OF MANUFACTURING PLASMA DISPLAY PANEL, METHOD OF MANUFACTURING LIQUID CRYSTAL PANEL, AND ELECTRONIC APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a thin film pattern which can reduce or distribute the occurrence of streaky unevenness on the thin film pattern when formaing the thin film pattern constituting pixels by using a droplet discharge system, and to provide a method of manufacturing an organic electro luminescent element, a method of manufacturing a color filter, a method of manufacturing a plasma display panel, a method manufacturing a liquid crystal display panel, and an electronic apparatus. <P>SOLUTION: The method of forming the thin film pattern comprises: a liquid applying treatment for applying a liquid material on a pixel region 1 having a long axis and a short axis using a droplet discharge system; and a short axial directional discharge treatment for discharging the droplet to the pixel region 1 from an ink jet nozzle provided in a nozzle head in the process of scanning the nozzle head of the droplet discharge apparatus to the short axial direction (the direction of scanning line L1, L2 and L3 ) of the pixel region 1 in the liquid applying treatment. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004358299(A) 申请公布日期 2004.12.24
申请号 JP20030156869 申请日期 2003.06.02
申请人 SEIKO EPSON CORP 发明人 SAKAI HIROBUMI
分类号 G02B5/20;B05D1/26;G02F1/13;G02F1/1335;H01J9/02;H01J9/24;H01J11/12;H01J11/22;H01J11/24;H01J11/26;H01J11/34;H01L51/00;H01L51/40;H01L51/50;H01L51/56;H05B33/10 主分类号 G02B5/20
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