发明名称 |
Microactuator |
摘要 |
<p>There has been a trade-off between the rigidity and the mass of a movable section of a microactuator, and also between the rigidity of the movable section and the electrostatic force. A microactuator 100 includes: a base 1; a first comb electrode 2 supported by the base 1; a movable section 6 having a second comb electrode 8 opposing the first comb electrode 2, and at least one reinforcement rib 9 protruding toward the base 1; and an elastic supporting member 3 for supporting the movable section 6 so as to allow the movable section 6 to be displaced with respect to the base 1. The height of the second comb electrode 8 is different from the height of the at least one reinforcement rib 9.
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申请公布号 |
EP1591824(A3) |
申请公布日期 |
2006.12.20 |
申请号 |
EP20050008890 |
申请日期 |
2005.04.22 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
KUROZUKA, AKIRA;MUSHIKA, YOSHIHIRO;KAJINO, OSAMU |
分类号 |
B81B3/00;G02B26/08;H02N1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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