发明名称 熱処理装置
摘要 PROBLEM TO BE SOLVED: To provide a heat treatment device which can lay a seal member for sealing a storage container along the storage container reliably and with less labor even when dimensional tolerance of the storage container for storing material to be treated is large.SOLUTION: A heat treatment device 1 includes a tube 2, an annular second seal member 22 and a seal holding device 71. The second seal member 22 is formed by using a material having elasticity and is fitted to an outer peripheral surface 11a of an opening part 11 of the tube 2. The seal holding device 71 includes a plurality of receiving members 74 arrayed in a peripheral direction C1, and a receiving member retaining mechanism 73 which retains the plurality of receiving members 74. Each receiving member 74 receives a part of the second seal members 22 in the peripheral direction C1. The receiving member retaining mechanism 73 is configured such that each position of receiving members 74 in a radial direction R1 can be adjusted.
申请公布号 JP5944281(B2) 申请公布日期 2016.07.05
申请号 JP20120198540 申请日期 2012.09.10
申请人 光洋サーモシステム株式会社 发明人 笠次 克尚;西村 圭介;浦崎 義彦;池田 真一;中西 裕也
分类号 F27B5/04;F27B5/06;F27D7/06;H01L21/22;H01L21/31;H01L21/324 主分类号 F27B5/04
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