INERT GAS RECOVERING DEVICE FOR SINGLE CRYSTAL PULLING-UP DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an inert gas recovering device with which a used inert gas passed through a CZ furnace can be purified and efficiently recovered. SOLUTION: The inert gas discharged from a dry vacuum pump 25 and containing dust is trapped in the flow of water while being cooled by the flow of water. Thereby, the inert gas can be recovered at a low cost.