| 发明名称 | Radiation source and lithographic apparatus | ||
| 摘要 | The present invention provides a method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator (500). The method comprises analyzing the resonance frequency spectrum of a system comprising the fuel-containing capillary and the piezo-electric actuator in particular to look for changes in the resonance frequencies of the acoustic system which may be indicative of a change in the properties of the system requiring investigation. | ||
| 申请公布号 | US9510432(B2) | 申请公布日期 | 2016.11.29 |
| 申请号 | US201314383359 | 申请日期 | 2013.02.07 |
| 申请人 | ASML Netherlands B.V. | 发明人 | Kempen Antonius Theodorus Wilhelmus;Dijksman Johan Frederik;Mestrom Wilbert Jan |
| 分类号 | H05G2/00;G03F7/20;B05B17/06 | 主分类号 | H05G2/00 |
| 代理机构 | Sterne, Kessler, Goldstein & Fox P.L.L.C. | 代理人 | Sterne, Kessler, Goldstein & Fox P.L.L.C. |
| 主权项 | 1. A method of monitoring operation of a radiation source fuel droplet stream generator comprising a capillary and a piezo-electric actuator that are coupled to each other, the method comprising: using the capillary to contain a fuel; and analyzing a resonance frequency spectrum of the coupled capillary and piezo-electric actuator during the operation of the radiation source fuel droplet stream generator using the coupled capillary and piezo-electric actuator. | ||
| 地址 | Veldhoven NL | ||