COATING DEVICE AND DEFECT REPAIR DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a coating device that allows for observing defects using an observation optical system while applying a coating, and a defect repair device.SOLUTION: A coating device 100 is for coating a microscopic area on a surface 30a of a target object with a liquid material, and includes a coating unit 10 configured to coat a microscopic area with a liquid material and an observation optical system 1 that enables observation of the microscopic area. The observation optical system 1 is installed such that an angle between an optical axis L of the observation optical system 1 and the surface 30a can be changed.SELECTED DRAWING: Figure 3