| 摘要 |
PURPOSE:To ensure normal flow rate characteristics by constituting an apparatus such that a laser beam is irradiated on the surface of a minute gap regions of upper and lower resin mold members on which foil mirrors are easy to deposit and scans the resin mold members while moving them. CONSTITUTION:A laser beam 24 generated from a laser oscillator 21 is collected by a condenser lens 26 via a bend mirror 25 and irradiated on the surfaces of the minute gap regions 27 of upper and lower mold members 8 and 9, respectively, on an X-Y tale. At this time, the table 22 is reciprocated in an X axis or a Y axis direction at a repetitive small pitch feed by a computer control unit 23. Instantaneous evaporation is generated in the regions 27 and an approximately uniform and suitably rough surface condition is obtained. Thus, the deposit of foil mirrors is removed and surely normal flow rate characteristics are ensured.
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