发明名称 VERTICAL TYPE MOS TRANSISTOR AND STATIC INDUCTION TRANSISTOR AND MOS TRANSISTOR HAVING TRENCH STRUCTURE AND MANUFACTURE OF VERTICAL TYPE SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To reduce on resistance by injecting holes as minority carriers to a drift layer by forming a second conductivity type impurity diffusion region electrically connected to a gate electrode onto the surface of the drift layer between second conductivity type impurity diffusion regions. SOLUTION: Positive threshold voltage is applied to gate electrodes 7 for bringing a vertical type MOS transistor to a conductive state in the vertical type MOS transistor. That is, when positive voltage is applied to the gate electrodes 7, holes as minority carriers are injected to a drift layer 2 from a P-type impurity diffusion region 23 because the P-type impurity diffusion region 23 is connected to the gate electrodes 7. Since a section, into which holes are injected, in the drift layer 2 is operated by a bipolar mode by holes and electrons in a conductivity modulation region, into which a current is flowed by holes and electrons, a voltage drop is lowered. Accordingly, since the MOS transistor is operated in the bipolar mode, by which the current is flowed by electrons and holes, on resistance can be reduced.
申请公布号 JPH09213954(A) 申请公布日期 1997.08.15
申请号 JP19960015618 申请日期 1996.01.31
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 HAGIWARA YOSUKE
分类号 H01L29/80;H01L29/739;H01L29/78 主分类号 H01L29/80
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