发明名称 DEVICE MANUFACTURING APPARATUS
摘要 PROBLEM TO BE SOLVED: To visualize apparatus status that has hitherto not been visualized during operation of a monitor screen protection means by displaying information relating to the apparatus and information relating to the operation of the apparatus on a monitor screen of the apparatus when the monitor screen protection means is operated. SOLUTION: In a monitor 1, the screen 11 is displaying a screen saver image. An information display area 12 is displayed when the screen saver is operated. Specified information on the apparatus is displayed thereon when the screen saver is on. The apparatus information displayed in the information display area 12 is, for example, a lot identification code Lot ID, which has been preset from the factory shipment or the like. The information can be created or changed by an operator with an operating means such as keyboard operation. Besides, the information display area 12 has been designed to move in an arrow A direction, not to impair the burnout prevention function inherent to the screen saver.
申请公布号 JP2000182924(A) 申请公布日期 2000.06.30
申请号 JP19980353169 申请日期 1998.12.11
申请人 CANON INC 发明人 KOJIMA YUJI
分类号 H01L21/027;G03F7/20;(IPC1-7):H01L21/027 主分类号 H01L21/027
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