| 摘要 |
PROBLEM TO BE SOLVED: To improve work efficiency during maintenance of an ion source.SOLUTION: An ion source IS comprises a plasma generation chamber 1 in which plasma is generated, and extraction electrode systems 7-9 which are formed from three or four electrodes for extracting an ion beam from the plasma generation chamber 1. The ion source IS also comprises a first flange 5 which supports the first electrode or the first and second electrodes which form the extraction electrode system, in a view from a side of the plasma generation chamber 1 and a second flange 6 which supports the remaining electrodes. The first flange 5 is coupled to the plasma generation chamber 1 and the second flange 6 in an engageable/disengageable manner.SELECTED DRAWING: Figure 1 |
