发明名称 Non-linear analog mapper for MEMS based optical circuit switches
摘要 This disclosure provides systems, methods, and apparatus for a MEMS mirrors based optical circuit switch. The optical circuit switch includes digital to analog converter (DAC) for converting digital position codes into analog mirror position signals. A mapper transforms the analog mirror position signal into a mapped mirror position signal. The mapped mirror position signal is provided to a MEMS actuator that positions the MEMS mirror based on the mapped mirror position signal. The mapper transforms the analog mirror position signal into the mapped mirror position signal such that the MEMS mirror position has a substantially linear relationship with the analog mirror position signal provided by the DAC.
申请公布号 US9366823(B1) 申请公布日期 2016.06.14
申请号 US201414274491 申请日期 2014.05.09
申请人 Google Inc. 发明人 McCauley Scott Donald
分类号 G02B6/35;G01C19/5712 主分类号 G02B6/35
代理机构 Foley & Lardner LLP 代理人 Gordon Edward A.;Foley & Lardner LLP
主权项 1. A micro-electromechanical systems (MEMS) based optical switch, comprising: a plurality of optical input ports providing incoming optical signals; a plurality of optical output ports providing outgoing optical signals; a plurality of MEMS light redirectors (LRs) for selectively redirecting the incoming optical signals to the plurality of optical output ports; a MEMS actuator for providing a MEMS LR position to at least one of the plurality of MEMS LRs in response to a drive signal, the MEMS actuator having a non-linear drive signal to MEMS LR position transfer function; and a driver circuit communicably coupled to the MEMS actuator, including: a digital-to-analog converter (DAC) for generating an analog MEMS position signal in response to a digital MEMS position value; anda non-linearity compensation circuit having an input coupled to an output of the DAC to receive the analog MEMS position signal, and an output coupled to the MEMS actuator for providing the drive signal to the MEMS actuator, the non-linearity compensation circuit implementing a transfer function that substantially counters the non-linearity of the drive signal to MEMS LR position transfer function such that the MEMS actuator exhibits a substantially linear response to the output of the DAC.
地址 Mountain View CA US