Plasma processing member, deposition apparatus including the same, and depositing method using the same

摘要

A deposition apparatus according to an exemplary embodiment of the present invention includes a plurality of reaction spaces, a plurality of plasma electrodes respectively disposed in the reaction spaces, a first plasma processor connected to at least two plasma electrodes, and a first plasma power source connected to the first plasma processor. The first plasma processor may include a plasma distributor or a plasma splitter.

主权项

1. A deposition apparatus comprising:
a plurality of reaction spaces including at least four reaction spaces; a plurality of plasma electrodes including at least four plasma electrodes, each of the plurality of plasma electrodes disposed in a corresponding one of the plurality of reaction spaces; a first gas pipe, a second gas pipe, a third gas pipe, and a fourth gas pipe, each of the gas pipes connected to a corresponding one of the plurality of reaction spaces, wherein the first gas pipe and the second gas pipe are connected to a first outer pipe at a first intersecting point and the third gas pipe and the fourth gas pipe are connected to a second outer pipe at a second intersecting point; and a plasma processor comprising:
a plasma splitter, the plasma splitter comprising a switch;a first plasma distributor connected to the plasma splitter;a first output terminal connected to the first plasma distributor and at least one of the plurality of plasma electrodes;a second plasma distributor connected to the plasma splitter;a second output terminal connected to the second plasma distributor and at least one of the plurality of plasma electrodes;a third plasma distributor connected to the plasma splitter;a third output terminal connected to the third plasma distributor and at least one of the plurality of plasma electrodes;a fourth plasma distributor connected to the plasma splitter;a fourth output terminal connected to the fourth plasma distributor and at least one of the plurality of plasma electrodes;a first plasma distributor driving circuit configured to measure a first magnitude of plasma power output from the first plasma distributor and the second plasma distributor, determine whether the first magnitude of plasma power output matches a first predetermined plasma power magnitude, and control the first magnitude of plasma power output;a second plasma distributor driving circuit configured to measure a second magnitude of plasma power output from the third plasma distributor and the fourth plasma distributor, determine whether the second magnitude of plasma power output matches a second predetermined plasma power magnitude, and control the second magnitude of plasma power output;a control board, the control board being configured to receive the first magnitude of plasma power output from the first plasma distributor driving circuit and the second magnitude of plasma power output from the second plasma distributor driving circuit;a splitter driving circuit, separate from the control board and configured to receive a signal from the control board, the splitter driving circuit also being configured to control the switch of the plasma splitter depending on the first magnitude of plasma power output and the second magnitude of plasma power output, the splitter driving circuit also being configured to confirm a correct switching operation by measuring an operation of the switch; wherein a position of the switch determines whether the first output terminal and the second output terminal apply a desired voltage to the at least one of the plurality of plasma electrodes or whether the third output terminal and the fourth output terminal apply a desired voltage to the at least one of the plurality of plasma electrodes.