COATING LIQUID FOR DOPANT DIFFUSION, AND METHOD OF PRODUCING SEMICONDUCTOR USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a coating liquid for dopant diffusion which allows for uniform coating on a mirror surface while enhancing the measurement accuracy of lifetime measurement, and improves productivity in semiconductor production, and to provide a method of producing semiconductor using the same.SOLUTION: A coating liquid for dopant diffusion principally containing (meth)acrylic acid ester-based resin (A) having a structural unit derived from (meth)acrylic acid ester monomer, where the carboxylic acid ester group in the (meth)acrylic acid ester monomer is a 3C-10C carboxylic acid ester group, a dopant (B) and a solvent (C) is used.SELECTED DRAWING: None