MULTI-CHAMBER TYPE HEAT TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a multi-chamber type heat treatment apparatus which suppresses lowering of cooling performance to mist.SOLUTION: A multi-chamber type heat treatment apparatus in which a plurality of heat chambers are arranged across an intermediate transfer chamber in a top face view, and processed objects are stored in the heat chambers via the intermediate transfer chamber includes: a gas cooling chamber provided adjacently to the intermediate transfer chamber in a top face view and cooling the processed objects by using gas; a gas blow port extended to the processed product in the gas cooling chamber; and a gas exhaust port extended to the processed object so as to face the gas blow port across the processed object. Furthermore, there is included a cooling gas circulating mechanism which blows cooling gas from the gas blow port and discharges from the gas exhaust port cooling gas which has contributed to cooling of the processed object.SELECTED DRAWING: Figure 1