METHOD OF ETCHING SEMICONDUCTOR CRYSTAL,申请号JP19940217700-传众专利搜索

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发明名称	METHOD OF ETCHING SEMICONDUCTOR CRYSTAL
摘要
申请公布号	JPH08321483(A)	申请公布日期	1996.12.03
申请号	JP19940217700	申请日期	1994.09.12
申请人	IMPERIAL COLLEGE OF SCI TECHNOL;RES DEV CORP OF JAPAN	发明人	KANEKO TADAAKI;KAWAMURA TAKAAKI;BURUUSU EE JIYOISU
分类号	C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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