摘要 |
<P>PROBLEM TO BE SOLVED: To provide a two-phase type glassy carbon member capable of attaining a thickness over 5 mm and a complicate shape using a porous glassy carbon capable of manufacturing a thick member, and, to solve its defect, using also a dense glassy carbon which is excellent in gas impermeability, surface hardness, and dust prevention than the porous glassy carbon, and a manufacturing method for the member. <P>SOLUTION: This two-phase type glassy carbon member 1 has a surface layer 1b comprising the dense glassy carbon on a base material 1a comprising the porous glassy carbon. <P>COPYRIGHT: (C)2005,JPO&NCIPI |