摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a flat sintered member which can keep the polishing finish after sintering to the minimum. <P>SOLUTION: The method for manufacturing the flat sintered member containing Al<SB>2</SB>O<SB>3</SB>, Mo and TiO<SB>2</SB>comprises the processes of forming a green sheet from a slurry containing a predetermined raw material powder and a binder, removing the binder from the green sheet, and carrying out the heat treatment of the binder-removed green sheet under a reducing atmosphere, and then sintering while maintaining the heating of the heat-treated green sheet at a specified temperature; and conduction of a further heat treatment can adjust a resistance value. <P>COPYRIGHT: (C)2005,JPO&NCIPI |