| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell capable of preventing performance deterioration, when forming a conductive layer on an in-process solar cell substrate by using physical vapor deposition method.SOLUTION: When forming a conductive layer on an in-process solar cell substrate including a photoelectric conversion layer where an amorphous semiconductor layer is formed on a crystal semiconductor substrate, an arrangement step for arranging on a tray having an insulating support on a conductive base material, a step for forming a conductive layer on the in-process solar cell substrate by physical vapor deposition, and a step for exchanging the support to other support, are performed in this order. The in-process solar cell substrate is arranged on the support so as not to come into contact with the conductive base material.SELECTED DRAWING: Figure 1 |
