| 摘要 |
<P>PROBLEM TO BE SOLVED: To simply conduct an operation even when a plurality of modules using an electric power are installed. <P>SOLUTION: An exposure device has the modules IM, MM, PM, WM and SM carrying out specified processings by using the electric power. Transmitters mutually transmitting the electric power in non-contact among three or more of the modules are provided. <P>COPYRIGHT: (C)2007,JPO&INPIT |
