发明名称 PROCESS FOR PRODUCING GROUP III ELEMENT NITRIDE CRYSTAL
摘要 A method for producing a high-quality group-III element nitride crystal at a high crystal growth rate, and a group-III element nitride crystal are provided. The method includes the steps of placing a group-III element, an alkali metal, and a seed crystal of group-III element nitride in a crystal growth vessel, pressurizing and heating the crystal growth vessel in an atmosphere of nitrogen-containing gas, and causing the group-III element and nitrogen to react with each other in a melt of the group-III element, the alkali metal and the nitrogen so that a group-III element nitride crystal is grown using the seed crystal as a nucleus. A hydrocarbon having a boiling point higher than the melting point of the alkali metal is added before the pressurization and heating of the crystal growth vessel.
申请公布号 EP2071062(A1) 申请公布日期 2009.06.17
申请号 EP20080720330 申请日期 2008.03.05
申请人 PANASONIC CORPORATION 发明人 YAMADA, OSAMU;MINEMOTO, JISASHI;HIRANAKA, KOUICHI;HATAKEYAMA, TAKESHI;SASAKI, TAKATOMO;MORI, YUSUKE;KAWAMURA, FUMIO;KITAOKA, YASUO
分类号 C30B29/40;C30B9/10;C30B11/12;C30B19/02;H01L33/32 主分类号 C30B29/40
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