DISCHARGE EXAMINATION DEVICE, WIRE-BONDING APPARATUS, AND DISCHARGE EXAMINATION METHOD

摘要

A discharge examination device for examining discharge of a wire-bonding apparatus that applies a voltage between a torch electrode and a wire to procure the discharge therebetween includes a current detection unit, a timer unit and a discharge determination unit. The current detection unit detects a discharge current flowing through the wire. The timer unit measures discharge detection time after application of the voltage before detection of the discharge current. The discharge determination unit determines whether or not the discharge is abnormal based on the discharge detection time. With this, a discharge examination device, a wire-bonding apparatus, and a discharge examination method that are capable of detecting abnormality of discharge are provided.

主权项

1. A discharge examination device for examining a discharge of a wire-bonding apparatus that applies a voltage between an electrode and a wire to procure the discharge therebetween, the device comprising:
a current detection unit configured to detect a discharge current flowing through the wire; a timer unit configured to measure a discharge detection time after application of the voltage before detection of the discharge current; and a discharge determination unit configured to determine whether or not the discharge is abnormal based on the discharge detection time.