| 摘要 |
Provided is a non-ionic photoacid generator (A) expressed by general formula (1). R1 and R2 each independently represents an alkyl group having 1-18 carbons or a fluoroalkyl group having 1-18 carbons, an alkenyl group having 2-18 carbons, an alkynyl group having 2-18 carbons, an aryl group having 6-18 carbons, a silyl group, or the like; m and n respectively represent the number of R1s and R2s, each number being an integer from 0 to 3, and the total number (m+n) of R1s and R2s being an integer from 1 to 6. The m number of R1s and the n number of R2s may each be the same or different. R3 represents a hydrocarbon having 1-18 carbons wherein one part or all of the hydrogen may be substituted by fluorine.; |
| 主权项 |
1. A non-ionic photoacid generator (A), being expressed by the following general formula (1):[In formula (1), R1 and R2 each independently represents an alkyl group having 1 to 18 carbon atoms or a fluoroalkyl group having 1 to 18 carbon atoms, an alkenyl group having 2 to 18 carbon atoms, an alkynyl group having 2 to 18 carbon atoms, an aryl group having 6 to 18 carbon atoms, a silyl group, an alkoxy group or aryloxy group represented by R11O—, an alkylthio group or arylthio group represented by R12S—, a sulfinyl group represented by R13SO—, a sulfonyl group represented by R14SO2—, an alkylcarbonyl group or arylcarbonyl group represented by R15CO—, a carbonyloxy group represented by R16COO—, an oxycarbonyl group represented by R17OCO—, a carbonate group represented by R18OCOO—, a urethane group represented by R19NHCOO—, or a halogen atom; m and n respectively represent the number of R1s and R2s, each number being an integer from 0 to 3, and the total number (m+n) of R1s and R2s being an integer from 1 to 6. The m number of R1s and the n number of R2s may each be the same or different. R3 represents a hydrocarbon group having 1 to 18 carbon atoms (wherein one part or all of hydrogen atoms may be substituted by fluorine atoms).] |
