发明名称 FIELD EMISSION DISPLAY DEVICE AND ITS PREPARATION
摘要 <p>PURPOSE: To provide a field emission display apparatus whose manufacturing process can be simplified, manufacturing cost can be lowered, and cathode life can be prolonged and to provide a method for manufacturing the apparatus. CONSTITUTION: A cathode 2 is formed on a substrate 1 and an insulating layer 3 is formed further thereon. After that, the insulating layer 3 is etched by using a photoresist 11. The photoresist 11 is then removed, and a separation layer 12 is formed on the resultant insulating layer 3. Next, a diamond cathode 10 and a diamond layer 13 are formed using diamond. Finally, the separation layer 12 is removed by a lift-off process. Moreover, in this apparatus, the insulating layer 3 having an aperture in a circular pattern is formed on the cathode 2 and the diamond cathode 10 is formed in the aperture of the insulating layer 3.</p>
申请公布号 JPH0855574(A) 申请公布日期 1996.02.27
申请号 JP19940329008 申请日期 1994.12.28
申请人 SANSEI DENKAN KK 发明人 BOKU DANSHIN
分类号 H01J31/10;G09F9/30;H01J9/02;H01J29/04;H01J31/12;H01L21/205;(IPC1-7):H01J9/02;H01J1/30 主分类号 H01J31/10
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