| 发明名称 |
CANTILEVER FOR PROCESSING |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cantilever for processing used for a processing method in which the function of an SPM (scanning probe microscope) is used for microprocessing and forming an accurate microstructural shape by preventing the attitude of the probe from being changed by processing resistance. <P>SOLUTION: This cantilever for processing comprises a lever part to which the probe for processing a work is secured and which applies a load to the work by elastic deformation. The lever part has multiple support parts. The probe is disposed at the center of gravity of the lever part. <P>COPYRIGHT: (C)2008,JPO&INPIT |
| 申请公布号 |
JP2008221376(A) |
申请公布日期 |
2008.09.25 |
| 申请号 |
JP20070061221 |
申请日期 |
2007.03.12 |
| 申请人 |
RICOH CO LTD |
发明人 |
ENDO HIROYUKI;KAI SATOSHI |
| 分类号 |
B82B3/00;B81B3/00;G01Q60/38;G01Q70/10;G01Q80/00;H01L21/027 |
主分类号 |
B82B3/00 |
| 代理机构 |
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| 主权项 |
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