摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an electrode for a lithium secondary battery which has a high battery capacity and is superior in charge and discharge cycle characteristics. <P>SOLUTION: This is the method of manufacturing the electrode for lithium secondary battery in which a thin film containing an active material is formed on a current collector, and is provided with an interfacial layer forming process of forming an interfacial layer on the current collector by an ion plating method and an active material layer forming process of forming an active material layer on the interfacial layer by a vapor deposition method. Furthermore, in the interfacial layer forming process, the interfacial layer is formed in plasma composed of an inert gas, and inert gas concentration contained in this interfacial layer is set to be 0.2% or less in weight percent. The electrode superior in the charge and discharge cycle characteristics can be obtained by this constitution. Moreover, time of forming the active material thin film can be shortened, and productivity of the electrode can be improved. <P>COPYRIGHT: (C)2007,JPO&INPIT |