| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor unit so structured as to detect only the light which has passed through a reference mark, and also to provide an exposure apparatus and a device manufacturing method. <P>SOLUTION: The sensor unit 100 comprises a first mark 103, second mark 104, first sensor 101 for detecting the light which has passed through the first mark, second sensor 102 for measuring the position of the first mark by detecting the light reflected by the second mark, and shadowing member 105 for blocking the light which has passed through the second mark. <P>COPYRIGHT: (C)2007,JPO&INPIT |
