发明名称 |
VOID ARRAY STRUCTURE AND METHOD FOR PRODUCING SAME |
摘要 |
A film-like void array structure having a first main surface and second main surface that oppose each other and a plurality of voids penetrating both the first main surface and second main surface, wherein at least one area that is a portion of the second main surface and touches three or more of the plurality of voids in a planar view from a direction normal to the second main surface has a protrusion protruding from the second main surface in the direction normal to the second main surface. |
申请公布号 |
WO2016117541(A1) |
申请公布日期 |
2016.07.28 |
申请号 |
WO2016JP51405 |
申请日期 |
2016.01.19 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
KAWARA, NAOKI;BANJU, MASARU;KONDO, TAKASHI;KAMBA, SEIJI |
分类号 |
G01N21/01;B01D67/00;B01D69/00;G01N21/3581 |
主分类号 |
G01N21/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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