发明名称 VOID ARRAY STRUCTURE AND METHOD FOR PRODUCING SAME
摘要 A film-like void array structure having a first main surface and second main surface that oppose each other and a plurality of voids penetrating both the first main surface and second main surface, wherein at least one area that is a portion of the second main surface and touches three or more of the plurality of voids in a planar view from a direction normal to the second main surface has a protrusion protruding from the second main surface in the direction normal to the second main surface.
申请公布号 WO2016117541(A1) 申请公布日期 2016.07.28
申请号 WO2016JP51405 申请日期 2016.01.19
申请人 MURATA MANUFACTURING CO., LTD. 发明人 KAWARA, NAOKI;BANJU, MASARU;KONDO, TAKASHI;KAMBA, SEIJI
分类号 G01N21/01;B01D67/00;B01D69/00;G01N21/3581 主分类号 G01N21/01
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