| 发明名称 | NBT-BT crystal piezoelectric film and piezoelectric stacking structure comprising the same | ||
| 摘要 | The present invention provides an NBT-BT film having a higher polarization-disappearance temperature. The present invention is a [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film. The [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film has a (001) orientation only. The [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film has a-axis length of not less than 0.390 nanometers and not more than 0.395 nanometers. The [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film has c-axis length of not less than 0.399 nanometers and not more than 0.423 nanometers (where x represents a value of not less than 0 and not more than 1). The [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film has a polarization-disappearance temperature of not less than 389 degrees Celsius. | ||
| 申请公布号 | US9482688(B2) | 申请公布日期 | 2016.11.01 |
| 申请号 | US201414322780 | 申请日期 | 2014.07.02 |
| 申请人 | PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD. | 发明人 | Tanaka Yoshiaki;Hashimoto Kazuya;Harigai Takakiyo;Adachi Hideaki;Fujii Eiji |
| 分类号 | H01L41/187;B32B9/00;G01C19/56;G01P3/02;H01L41/113;C23C14/08;H01L41/09;G01C19/5607 | 主分类号 | H01L41/187 |
| 代理机构 | McDermott Will & Emery LLP | 代理人 | McDermott Will & Emery LLP |
| 主权项 | 1. A [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film, wherein the [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film has a (001) orientation only; the [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film has an a-axis length of not less than 0.390 nanometers and not more than 0.395 nanometers; the [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film has a c-axis length of not less than 0.399 nanometers and not more than 0.423 nanometers; x represents a value of not less than 0 and not more than 1; and the [(Na,Bi)1-xBax]TiO3 crystal piezoelectric film has a polarization-disappearance temperature of not less than 389 degrees Celsius. | ||
| 地址 | Osaka JP | ||