| 摘要 |
PURPOSE: To suppress formation of enveloped hot pots by coupling high-frequency power from a source with a splitter. CONSTITUTION: A high-frequency source 20 supplies high-frequency power to a power splitter and a phase shifter 22. The phase shifter 22 supplies the output at the frequency of a container 10 to an electric field applicators AP 12, 14, 16, 18. The phase and the amplitude of the signals to be applied to the AP 12, 14, 16, 18 are selected so as to rotate the electric field to be applied to the container 10 at the frequency of a source 20. In other words, the output of the phase shifter 22 has equal amplitude, and the signals applied to the AP 12, 14 have phases shifted by 180 deg.. Similarly, the signals applied to the AP 16, 18 have phases shifted by 180 deg.. The signals to be applied to the neighboring AP have phase shifted by 90 deg.. Power input to the plasma in the container 10 is carried out evenly in planes by using a rotating electric field and the partial heating effect on the lamp outer coating is lowered, so that arc adhesion phenomenon where hot spots are formed on the lamp wall can be avoided. |
