Method of forming a metalfluoride film of an electronic device,申请号EP19960106151-传众专利搜索

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发明名称	Method of forming a metalfluoride film of an electronic device
摘要
申请公布号	EP0725429(A3)	申请公布日期	1997.01.29
申请号	EP19960106151	申请日期	1991.07.04
申请人	OHMI, TADAHIRO	发明人	OHMI, TADAHIRO
分类号	H01L29/78;H01L21/28;H01L21/314;H01L21/336;H01L21/8238;H01L29/51;H01L39/24;(IPC1-7):H01L21/314;H01L39/22	主分类号	H01L29/78
代理机构		代理人
主权项
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