发明名称 VALVE APPARATUS FOR RAPID EXHAUST
摘要 A rapid exhaust valve apparatus is provided to reduce an exhaust time by exhausting directly air through three holes in the exhaust valve. A valve apparatus controls a gas supply path or a liquid supply path and includes a valve body(320) and a sealing disk(310). The valve body includes an internal space having a cavity and three different outlets for providing paths between the internal space and the outside in order to output and input gas or liquid. The sealing disk is positioned in the internal space of the valve body. The gas or the liquid is outputted by closing one of the remaining two outlets and opening the other one by the input pressure of the gas or the liquid when the gas or the liquid are inputted through one of the different outlets. The valve has a T-shaped structure and a first to third outlets.
申请公布号 KR20070093692(A) 申请公布日期 2007.09.19
申请号 KR20060023872 申请日期 2006.03.15
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KO, YONG CHUL
分类号 H01L21/02 主分类号 H01L21/02
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