POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING RESIST PATTERN AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To further improve sensitivity and resolution in relation to a positive photosensitive resin composition which is developable with an aqueous alkali solution.

SOLUTION: The positive photosensitive resin composition comprises: (A) an alkali-soluble resin having a phenolic hydroxyl group; (B) a compound which generates an acid under light; (C) an elastomer; (D) a low molecular compound having a phenolic hydroxyl group; and (E) a solvent.

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