| 摘要 |
PURPOSE:To provide an ultrapure water producing device with the water utilization rate enhanced by limiting the TOC in the waste water generated due to use of ultrapure water and returning the low-TOC water to the preceding stage. CONSTITUTION:This device consists of a primary pure water producing device, a secondary pure water producing device and a recovery device for removing the TOC in the waste water generated at the using place 20, and the recovery device is provided with a biological treating device 26, an ozone feeder 28 and a UV irradiation device 30. |
