摘要 |
A circular membrane diaphragm (14) is edge-mounted on a generally cylindrical housing structure (12) that allows the diaphragm to deform when a differential pressure is applied across it. The housing structure also supports a circular electrode in an internal chamber and in close proximity to the back surface of the diaphragm to form a variable capacitor. The outer side of the membrane is exposed to a second chamber defined by the housing structure and a cover (30).
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