| 发明名称 |
POSITION FEEDBACK FOR SEALED ENVIRONMENTS |
| 摘要 |
A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive, where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, at least one seal partition configured to isolate the isolated environment, and at least one sensor including a magnetic sensor member connected to the housing, at least one sensor track connected to the at least one rotor where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment. |
| 申请公布号 |
US2016164382(A1) |
申请公布日期 |
2016.06.09 |
| 申请号 |
US201414540058 |
申请日期 |
2014.11.13 |
| 申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
MOURA Jairo T.;SAEIDPOURAZAR Reza;Gunn Branden;Coady Matthew W.;Gilchrist Ulysses |
| 分类号 |
H02K11/215;H01L21/687;H02K1/14;H01L21/677;H02K5/128;H02K1/24 |
主分类号 |
H02K11/215 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A transport apparatus comprising:
a housing; a drive mounted to the housing; and at least one transport arm connected to the drive, where the drive includes
at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment;at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator;at least one seal partition configured to isolate the isolated environment; andat least one sensor including
a magnetic sensor member connected to the housing;at least one sensor track connected to the at least one rotor;where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment. |
| 地址 |
Chelmsford MA US |
