发明名称 Method of producing surface acoustic wave device and the surface acoustic wave device
摘要 A method of producing a surface acoustic wave device includes the steps of forming a first electrode film (2) for constituting an interdigital electrode (5), a wiring electrode (6), and an electrode pad (7) on the piezoelectric substrate (1), forming an insulation film (3) on the piezoelectric substrate (1) so as to cover the first electrode film (2), patterning the insulation film (3) so that the insulation film existing on the portion of the first electrode film (2) onto which a second electrode film (4) is to be laminated is removed, forming the second electrode film (4) on the portion of the first electrode film (2) from which the insulation film (3) has been removed, and bonding a bump (8) onto the second electrode film (4). <IMAGE>
申请公布号 KR100766262(B1) 申请公布日期 2007.10.15
申请号 KR20040078234 申请日期 2004.10.01
申请人 发明人
分类号 H03H3/08;H03H9/02;H03H9/15;H03H9/25 主分类号 H03H3/08
代理机构 代理人
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