| 摘要 |
PURPOSE: To provide a ceramic filament, a manufacturing method therefor and a ceramic filament for a complex, which is stable at a high temperature. CONSTITUTION: A ceramic filament is composed of a tungsten core and an outer laver of silicon carbide, and the tungsten core and the outer layer are separated from each other by an intermediate layer of titanium carbide. In this manufacturing method, the filament, upon being heated by passing through a deposit chamber containing a gas for depositing a covering by contacting with a high temperature filament is passed, and the gas is composed of a hydrocarbon and a halogenated titanium compound. The halogenated titanium compound deposits a titanium carbide covering on tungsten, formed by making a contact with a tungsten filament before the hydrocarbon. |
