| 摘要 |
PROBLEM TO BE SOLVED: To provide a current reflux mechanism of rotating anticathode which can be used as micro-focus X-ray source. SOLUTION: The rotating anticathode 1 is provided with a casing 2, a hollow rotating shaft 7 arranged in free rotation with the casing 2, and a hollow fixed shaft coaxial with the hollow rotating shaft 7, and a flowing passage for a cooling liquid for cooling a target 5 of the anticathode is communicated and a current reflux shaft 31 is provided at the center of the hollow rotating shaft 7 rotating coaxially and integrally with the hollow rotating shaft 7, and, with the other end supported by a detachable contact terminal part 30 equipped outside the casing 2, a reflux means is provided of an electric charge generated by irradiation of electron beam at the target 5 through the current reflux shaft 31.
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