| 摘要 |
<P>PROBLEM TO BE SOLVED: To normally form a bonding wire and an electrodeposition film on a surface of a structure made of gold, even after treatment with oxygen which has been turned in an activated state. <P>SOLUTION: A control electrode 118 and a movable portion electrode 109 are irradiated with oxygen plasma, to remove residual carbon based contamination (organic substances) on their surfaces. Then the substrate 101, treated with the oxygen plasma, is immersed in hydrochloric acid solution adjusted around pH4.8, for example, to allow the hydrochloric acid to act on the surfaces of the control electrode 118 and the movable portion electrode 109. According to this acid treatment, gold oxide formed by the irradiation with oxygen-containing plasma on the surfaces of the control electrode 118, and the movable portion electrode 109 made of gold is removed. <P>COPYRIGHT: (C)2010,JPO&INPIT |
