METHOD OF INSTALLING ELASTOMER RING IN SEMICONDUCTOR PROCESSING EQUIPMENT AND GUIDING SHEET AND JIG USED IN INSTALLING ELASTOMER RING

摘要

Provided are a method, a guiding sheet, a partial filling jig, and a full filling jig for installing an elastomer ring in the semiconductor processing equipment. The guiding sheet, the partial filling jig, and the full filling jig dispose the elastomer ring in the groove of the semiconductor processing equipment smoothly and evenly. Furthermore, the surface of the elastomer ring may be divided to multiple arcs portions. Each one of the arc portions may be pressed by the partial filling jig or the full filling jig in a particular sequence. When the groove is filled by the elastomer ring accurately and completely, the elastomer ring may block the fluid and the etching gas effectively. The elastomer ring may help the semiconductor processing equipment to work continuously and maintain qualities of the etching wafers.

主权项

1. A method of installing an elastomer ring in a semiconductor processing equipment comprising a susceptor body including a top surface and a supporting element mounted to the top surface, and the supporting element comprising a top portion and a connecting portion, and a groove formed among the top surface, the top portion, and the connecting portion, and the method comprising steps of:
disposing preliminarily: disposing the elastomer ring to a side surface of the susceptor body and close to the top surface; positioning: placing the elastomer ring into a notch formed on a guiding sheet; moving the elastomer ring toward a periphery of the groove with the guiding sheet, and then aligning the elastomer ring to the groove; filling partially: pressing the elastomer ring by a partial filling jig; disposing the elastomer ring into the groove and filling the groove partially by the elastomer ring; and filling fully: pressing the elastomer ring by a full filling jig until the groove is completely filled by the elastomer ring.