Particle optical system

摘要

A particle optical system comprises a beam generating system (3) configured to generate a plurality of particle beams (5) and to direct the plurality of particle beams (5) onto an object plane (7), a first deflector arrangement (35) arranged in the beam path of the particle beams (5) upstream of the object plane (7) and configured to deflect the plurality of particle beams (5) before they are incident on the object plane (7), an object holder (15) configured to hold an object (17) to be inspected in the object plane (7), a plurality of detectors (27) configured to receive and to detect the plurality of particle beams (5) having traversed the object plane (7), wherein the detectors are arranged in a detection plane (21) on a side of the object plane (7) opposite to the beam generating system (3), at least one first particle optical lens (19) configured to collect particles of the particle beams emanating from the object plane on the detectors (27), and a controller (31) configured to control the first deflector arrangement (35) in order to deflect locations of incidence (9) of the particle beams (5) on the object plane (7) by deflecting the particle beams (5).

主权项

1. A particle optical system comprising:
a beam generating system configured to generate a plurality of separate particle beams and to direct the plurality of particle beams onto an object plane; a first deflector arrangement arranged in the beam path of the particle beams upstream of the object plane and configured to deflect the plurality of particle beams before they are incident on the object plane; an object holder configured to hold an object to be inspected in the object plane; a plurality of detectors configured to receive and to detect the plurality of particle beams having traversed the object plane, wherein particle sensitive surfaces of the detectors are arranged in a detection plane on a side of the object plane opposite to the beam generating system; at least one first particle optical lens configured to collect particles of the particle beams emanating from the object plane on the detectors; and a controller configured to control the first deflector arrangement in order to deflect locations of incidence of the particle beams on the object plane by deflecting the particle beams.