PATTERN DEFECT INSPECTION METHOD, PATTERN DEFECT INSPECTING TEST PATTERN BOARD, PATTERN DEFECT INSPECTION DEVICE, PHOTO MASK MANUFACTURING METHOD, AND METHOD OF MANUFACTURING DISPLAY DEVICE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To inspect the presence/absence of a micro defect caused in a repeat pattern.

SOLUTION: This pattern defect inspection method for inspecting a defect caused in a repeat pattern of a body to be inspected having a repeat pattern in which a unit pattern is periodically arrayed includes: a process of superposing a test pattern where a testing unit pattern is periodically arrayed and the repeat pattern to form a superposition pattern; a process of applying light at a predetermined incident angle to the superposition pattern; and a process of inspecting the presence/absence of a defect caused in the repeat pattern by observing diffracted light from the superposition pattern.

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