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发明名称
ELECTRON GUN FOR VACUUM DEPOSITION DEVICE AND VACUUM DEPOSITION DEVICE HAVING THE SAME
摘要
申请公布号
JPH07258832(A)
申请公布日期
1995.10.09
申请号
JP19940056224
申请日期
1994.03.25
申请人
TOPPAN PRINTING CO LTD
发明人
SEKIGUCHI MAMORU
分类号
C23C14/30;(IPC1-7):C23C14/30
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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