发明名称 |
PROGRAMMABLE DEPOSITION OF THIN FILMS OF A USER-DEFINED PROFILE WITH NANOMETER SCALE ACCURACY |
摘要 |
An inkjet-based process for programmable deposition of thin films of a user-defined profile. Drops of a pre-cursor liquid organic material are dispensed at various locations on a substrate by a multi-jet. A superstrate is held in a roll-to-roll configuration such that a first contact of the drops is made by a front side of the superstrate thereby initiating a liquid front that spreads outward merging with the drops to form a contiguous film captured between the substrate and the superstrate. A non-equilibrium transient state of the superstrate, the contiguous film and the substrate then occurs after a duration of time. The contiguous film is then cured to crosslink it into a polymer. The superstrate is then separated from the polymer thereby leaving a polymer film on the substrate. In such a manner, non-uniform films can be formed without significant material wastage in an inexpensive manner. |
申请公布号 |
US2016318066(A1) |
申请公布日期 |
2016.11.03 |
申请号 |
US201615207788 |
申请日期 |
2016.07.12 |
申请人 |
Board of Regents, The University of Texas System |
发明人 |
Sreenivasan Sidlgata V.;Singhal Shrawan;Abed Ovadia;Dunn Lawrence |
分类号 |
B05D3/12;G02B5/28;G02B1/111;B05D1/02;B05D3/06 |
主分类号 |
B05D3/12 |
代理机构 |
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代理人 |
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主权项 |
1. A process for depositing thin films, the process comprising:
dispensing drops of a pre-cursor liquid organic material at a plurality of locations on a substrate by an array of inkjet nozzles; closing a gap between said substrate and a superstrate thereby allowing said drops to form a contiguous film captured between said substrate and said superstrate, wherein said superstrate is loaded in a roll-to-roll configuration; selecting parameters of one of said superstrate, said contiguous film and said substrate to enable increased time to an equilibrium state thereby enabling capture of non-equilibrium transient states of said superstrate, said contiguous film and said substrate to occur after a duration of time; curing said contiguous film to solidify it into a solid; and separating said superstrate from said solid thereby leaving a polymer film on said substrate. |
地址 |
Austin TX US |