| 摘要 |
<p>PURPOSE:To manufactue a laser-marking device to an IC, etc., which can decide acceptable or rejectable marking, by arranging a laser light-receiving element at a specific position. CONSTITUTION:Pulse beams from a laser generator 1 are projected to the surface of an IC3 through a mask 5, and a mark 29 is put. In this case, beams passing through two holes 19 bored to the mask 5 pass through air gaps 25 at both ends of the IC3 through an optical system 6 and are projected to a pair of light- receptors 7, marking work is stopped when there is no signal from both light- receptors, and missed marking is prevented. The laser generator 1 is triggered when an index 10 for the IC is detected by another light source 27 and a light- receptor 28, and a mark is put at an accurate position.</p> |
