发明名称 |
Method of producing micro structure, method of producing liquid discharge head, liqud discharge head produced thereby, head cartridge loaded with liquid discharge head, and device for discharging liquid produced therewith |
摘要 |
<p>A method of producing a micro structure on a substrate which has a support portion and a plate-like portion supported thereby at a distance from the substrate, comprising the steps of forming a spacer layer consisting of an insulating material on a substrate having an electrically conductive layer formed on its surface, forming a latent image layer consisting of an electrically conductive material on the spacer layer at a site where the plate-like portion of an intended structure is to be formed, producing an aperture, where a part of the electrically conductive layer is exposed, on the spacer layer at a site where the supporting portion of an intended structure is to be formed, forming a structure layer consisting of plating film inside of the aperture and on the latent image layer by electroplating the electrically conductive layer as a cathode, and removing the spacer layer. <IMAGE></p> |
申请公布号 |
EP0956954(A2) |
申请公布日期 |
1999.11.17 |
申请号 |
EP19990107564 |
申请日期 |
1999.04.15 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
YAGI, TAKAYUKI;HIROKI, TOMOYUKI;OZAKI, TERUO;KUBOTA, MASAHIKO |
分类号 |
B41J2/14;B41J2/16;(IPC1-7):B41J2/16;B41J2/05 |
主分类号 |
B41J2/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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