| 摘要 |
PROBLEM TO BE SOLVED: To provide a good heating device and an assembled device. SOLUTION: The heating device has a heating member A constructed by laminating the first plate 12 and the second plate 11 heating a plate-shaped object to be heated, and a heater 13 which is a heat source for the object to be heated. The heat conductivity of the first plate is bigger than that of the second plate, and the creep of the second plate is smaller than that of the first plate. The difference of the linear expansion coefficient between the first plate and the second plate is made so as to keep the flatness of the heating member within a prescribed value or less than 3×10-6.
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