发明名称 FILM DEPOSITION METHOD
摘要 PROBLEM TO BE SOLVED: To form a highly adhesive film on a metal foil in a method of forming a film on a metal foil. SOLUTION: A plurality of island-shaped structures 12 are formed on the surface 10a of the metal foil 10 while partly exposing the surface. Then, a film 20 is formed to cover these island-shaped structures. These island-shaped structures form irregularity on the surface of the metal foil. Once the film 20 is formed to cover the island-shaped structures, the irregularity consisting of the island-shaped structures and the film are meshed with each other. This raises adhesiveness of the film with respect to the metal foil. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007242880(A) 申请公布日期 2007.09.20
申请号 JP20060063028 申请日期 2006.03.08
申请人 TDK CORP 发明人 SAYA HIROKO;KATO TOMOHIKO;HORINO KENJI
分类号 H01G4/33;B32B15/01;H01G4/12;H01L21/28;H01L21/822;H01L23/12;H01L27/04;H05K3/38 主分类号 H01G4/33
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